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Volumn 11, Issue 10, 2000, Pages 744-757
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Distributed sensing and shape control of piezoelectric bimorph mirrors
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
ELECTRIC FIELDS;
ELECTRON GUNS;
INTERFEROMETRY;
MECHANICAL VARIABLES CONTROL;
MIRRORS;
OPTICAL SENSORS;
RAY TRACING;
REMOTE SENSING;
SEMICONDUCTOR LASERS;
SPACE TELESCOPES;
THIN FILMS;
ELECTRON FLUX;
ELECTRONIC SPECKLE PATTERN INTERFEROMETRY;
MIRROR FIGURE SENSING;
MULTIBEAM OPTICAL STRESS SENSOR;
PIEZOELECTRIC BIMORPH MIRRORS;
SHAPE CONTROL;
PIEZOELECTRIC MATERIALS;
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EID: 0034289159
PISSN: 1045389X
EISSN: None
Source Type: Journal
DOI: 10.1106/2ULX-MNQH-Y1AF-8B5V Document Type: Article |
Times cited : (31)
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References (27)
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