Surface morphology and structural observation of laser interference crystallized a-Si:H/a-SiNx:H multilayers

Applied Surface Science

Volumn 165, Issue 2, 2000, Pages 85-90

  Wang, Li ^a   Li, Jian ^a   Huang, Xinfan ^a   Li, Qiliang ^a   Yin, Xiaobo ^a   Fan, Wenbin ^a   Xu, Jun ^a,b   Li, Wei ^a   Li, Zhifeng ^b   Zhu, Jianming ^a   Wang, Mu ^a   Liu, Zhiguo ^a   Chen, Kunji ^a  

^a NANJING UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; EXCIMER LASERS; HIGH RESOLUTION ELECTRON MICROSCOPY; MORPHOLOGY; MULTILAYERS; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SILICON NITRIDE; SURFACE STRUCTURE; TRANSMISSION ELECTRON MICROSCOPY;

CROSS-SECTION TRANSMISSION ELECTRON MICROSCOPY (TEM); PHASE SHIFTING MASK GRATING;

SURFACE PHENOMENA;

EID: 0034275168     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00308-1     Document Type: Article

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