Nanometric displacement measurement method using the detection of fringe peak movement

Measurement Science and Technology

Volumn 11, Issue 9, 2000, Pages 1352-1358

  Yi, Jong Hoon ^a   Kim, Soo Hyun ^a   Kwak, Yoon Keun ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LEAST SQUARES APPROXIMATIONS; MEASUREMENT ERRORS; SPECKLE; SPURIOUS SIGNAL NOISE;

DISPLACEMENT MEASUREMENT; FRINGE PEAK MOVEMENT;

INTERFEROMETRY;

EID: 0034274719     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/9/314     Document Type: Article

References (11)