Sequential turret source-masking system for fabrication of multilayer structures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2595-2596

  Anthopoulos, T ^a   Shafai, T S ^a  

^a STAFFORDSHIRE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; MULTILAYERS; SHAFTS (MACHINE COMPONENTS); THIN FILMS;

SEQUENTIAL TURRET SOURCE-MASKING SYSTEM;

VACUUM TECHNOLOGY;

EID: 0034273911     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1285989     Document Type: Article

References (1)

1. C. J. Bowler and R. D. Gould, J. Vac. Sci. Technol. A 5, 114 (1987).