Transient temperature performance of an integrated micro-thermal system

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 466-476

  Jiang, Linan ^a   Wong, Man ^a   Zohar, Yitshak ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

FLUIDIC DEVICES; FORCED CONVECTION; MICROSENSORS; NATURAL CONVECTION; TEMPERATURE DISTRIBUTION;

MICROTHERMAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034273242     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/324     Document Type: Article

References (14)

1. Northrupt M A, Gonzalez C, Hadley D, Hills R F, Landre P, Lehew S, Saiki R, Sninsky J J, Watson R and Watson R Jr 1995 10th Int. Conf. on Solid-State Sensors and Actuators, Transducer '95 (Sweden) pp 764-65
2. Petersen K 1996 Proc. IEDM 96 pp 239-42
3. Shoffner M A, Cheng J, Shoffner M A, Hvichia G E, Kricha L J and Wilding P 1996 Nucleic Acids Res. 24 375-9
4. Cheng J, Shoffner M A, Hvichia G E, Kricha L J and Wilding P 1996 Nucleic Acids Res. 24 380-5
5. Chaudhari A M, Woudenberg T M, Albin M and Goodson K E 1998 J. Microelectromech. Syst. 7 345-55
6. Woolley A T, Hadley D, Eandre P, deMello A J, Mathies R A and Northrupt M A 1996 Anal. Chem. 68 4081-6
7. Zumbrunnen DA 1992 ASME J. Heat Transfer 114 85-93
8. Rujano J R and Rahman M M 1997 ASME J. Electronic Packaging 119 239-46
9. Jiang L, Wong M and Zohar Y 1999 Meas. Sci. Technol. 10 653-64
10. Jiang L, Wong Y L, Wong M and Zohar Y 1999 J. Micromech. Microeng. 9 422-8
11. Jiang L, Wong M and Zohar Y 1999 J. Microelectromech. Syst. 8 358-65
12. Jiang E, Wong M and Zohar Y 2000 Sensors Actuators A 82 108-13
13. Incropera F P and Dewitt D P 1990 Fundamentals of Heat and Mass Transfer (New York: Wiley)
14. Peng X F and Peterson G P 1995 Int. J. Heat Mass Transfer 38 755-8