Pinhole defects evaluation of TiN films prepared by dynamic ion beam mixing method

Zairyo to Kankyo/ Corrosion Engineering

Volumn 49, Issue 9, 2000, Pages 553-556

  Nagasaka, Hiroshi ^a   Sugimoto, Katsuhisa ^b  

^a EBARA CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC POLARIZATION; BEARINGS (MACHINE PARTS); DEFECTS; INORGANIC COATINGS; ION BEAMS; MOLECULAR ORIENTATION; PASSIVATION; ROTATING MACHINERY; SEALS; STAINLESS STEEL; VAPOR DEPOSITION; VICKERS HARDNESS TESTING;

CRITICAL PASSIVATION CURRENT DENSITY (CPCD); DYNAMIC ION BEAM MIXING; PINHOLE DEFECTS;

TITANIUM NITRIDE;

EID: 0034264875     PISSN: 09170480     EISSN: None     Source Type: Journal    
DOI: 10.3323/jcorr1991.49.553     Document Type: Article

References (8)

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3. H. Nagasaka, N. Tsuchiya, M. Kiuchi, A. Chayahara, K. Fujii and M. Satou: Nucl. Instr. and Meth., B80/81, 1380 (1993).
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8. Japanese source