Electron spectroscopy study of plasma assisted amorphous carbon deposition

Thin Solid Films

Volumn 373, Issue 1-2, 2000, Pages 261-265

  Ghezzi, F ^a   Dellera, F ^a   Shmayda, W T ^b   Sancrotti, M ^a,c,d  

^a ASSOCIAZIONE EURATOM ENEA SULLA FUSIONE   (Italy)

^b ONTARIO HYDRO TECHNOLOGIES   (Canada)

^c LABORATORIO TASC   (Italy)

^d UNIVERSITÀ CATTOLICA DEL SACRO CUORE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC STRUCTURE; HYDROGEN; METHANE; MORPHOLOGY; POROSITY; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CYLINDRICAL PLASMA CONFIGURATION;

DIAMOND FILMS;

EID: 0034262687     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01093-2     Document Type: Article

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