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Thin Solid Films

Volumn 373, Issue 1-2, 2000, Pages 84-88

Characterization of sputtered Ta-Ru thin films for ink-jet heater applications

(3) Wuu, D S a Chan, C C a Horng, R H b

a DA YEH UNIVERSITY (Taiwan)

b NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC POTENTIAL; HEAT TREATMENT; OXIDATION; PASSIVATION; SEMICONDUCTING SILICON; SPUTTERING; TANTALUM ALLOYS; THERMODYNAMICS; THIN FILMS;

COSPUTTERING;

METALLIC FILMS;

EID: 0034262476 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(00)01098-1 Document Type: Article

Times cited : (4)

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