Surface shape measurement for a multilayered object by synthesis of optical coherence function

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 6, Issue 5, 2000, Pages 723-729

  Hotate, Kazuo ^a   He, Zuyuan ^a   Kitazume, Takahiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; FOURIER TRANSFORMS; FREQUENCY MODULATION; LIGHT INTERFERENCE; LIGHT REFLECTION; SURFACE MEASUREMENT;

INTERFERENCE FRINGE ANALYSIS; OPTICAL COHERENCE FUNCTIONS;

INTERFEROMETRY;

EID: 0034261985     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.892610     Document Type: Article

References (22)

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