SOG annealing keeps its cool

European Semiconductor

Volumn 22, Issue 8, 2000, Pages 17-18

  Yoo, Woo Sik ^a   Fukada, Takashi ^a   Yamamoto, Jiro ^a  

^a WaferMasters ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILEVEL INTERCONNECTS; SPIN-ON-GLASS ANNEALING;

ANNEALING; ELECTRIC CONTACTS; LOW TEMPERATURE OPERATIONS;

VLSI CIRCUITS;

EID: 0034250096     PISSN: 02656027     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)