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Volumn 58, Issue 2, 2000, Pages 420-427
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FeSi2 thin films investigated by X-ray photoelectron and infrared spectroscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
BINDING ENERGY;
CHEMICAL BONDS;
ELECTRON BEAMS;
EVAPORATION;
INFRARED SPECTROSCOPY;
ION BEAMS;
IRON ALLOYS;
PHASE COMPOSITION;
RAPID THERMAL ANNEALING;
SEMICONDUCTING SILICON;
X RAY PHOTOELECTRON SPECTROSCOPY;
ELECTRON-BEAM EVAPORATION;
ION SPUTTERING;
ION-BEAM EVAPORATION;
IRON SILICIDE;
SEMICONDUCTING FILMS;
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EID: 0034248171
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(00)00200-1 Document Type: Article |
Times cited : (2)
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References (14)
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