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Volumn 23, Issue 4, 2000, Pages 249-253
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Optimization of time-temperature schedule for nitridation of silicon compact on the basis of silicon and nitrogen reaction kinetics
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPOSITION EFFECTS;
CRYSTAL IMPURITIES;
DENSITY (SPECIFIC GRAVITY);
DOPING (ADDITIVES);
FIRING (OF MATERIALS);
HIGH TEMPERATURE EFFECTS;
IRON;
NITRIDING;
PHASE TRANSITIONS;
POWDERS;
REACTION KINETICS;
SINTERING;
GREEN COMPACTS;
SILICON NITRIDE;
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EID: 0034247647
PISSN: 02504707
EISSN: None
Source Type: Journal
DOI: 10.1007/BF02720078 Document Type: Article |
Times cited : (4)
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References (21)
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