Capacitive ultrasonic transducer with net backplate

Measurement Science and Technology

Volumn 11, Issue 8, 2000, Pages 1119-1125

  Mattila, P ^a   Stor Pellinen, J ^b   Ignatius, J ^b   Hietanen, J ^c,d   Luukkala, M ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

^c AALTO UNIVERSITY   (Finland)

^d NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; ELECTRODES; ELECTROSTATICS; ESTIMATION; FREQUENCY RESPONSE; MATHEMATICAL MODELS; NATURAL FREQUENCIES; SENSITIVITY ANALYSIS;

AIRBORNE ULTRASOUND; CAPACITIVE ULTRASONIC TRANSDUCER; NET BACKPLATE; SURFACE CHARGE DENSITY DISTRIBUTION; ULTRASONIC TRANSMITTING RESPONSE;

ULTRASONIC TRANSDUCERS;

EID: 0034246503     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/8/304     Document Type: Article

References (11)