Optimized linear decomposition of data obtained during AES depth profiling

Surface and Interface Analysis

Volumn 30, Issue 1, 2000, Pages 190-194

  Kovac J ^a   Bogataj, T ^b   Zalar, A ^a  

^a Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

^b Iskratel   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ANNEALING; DOPING (ADDITIVES); FOURIER TRANSFORMS; INTERFACES (MATERIALS); KINETIC ENERGY; NICKEL; NITROGEN; OPTIMIZATION; SILICON; TITANIUM NITRIDE;

DEPTH PROFILING; FACTOR ANALYSIS; LINEAR DECOMPOSITION METHOD; LINEAR LEAST-SQUARES FITTING; ORTHOGONALIZATION; SPECTRAL SMOOTHING;

AUGER ELECTRON SPECTROSCOPY;

EID: 0034245315     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200008)30:1<190::AID-SIA808>3.3.CO;2-6     Document Type: Article

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