Artifacts in AES microanalysis for semiconductor applications

Surface and Interface Analysis

Volumn 30, Issue 1, 2000, Pages 377-382

  King, Paul L ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BACKSCATTERING; CARRIER CONCENTRATION; MICROANALYSIS;

ELECTRON BEAM DAMAGE; SILICON OXIDES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0034244757     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200008)30:1<377::AID-SIA829>3.0.CO;2-M     Document Type: Article

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