Limitations on the extraction of loss tangent from submicron transmission line test structures

IEEE Transactions on Advanced Packaging

Volumn 23, Issue 3, 2000, Pages 393-397

  Friar, Robert J ^a   Neikirk, Dean P ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Integrated circuit interconnections; Materials testing; Microstrip; Microwave measurements; Scattering parameters measurement

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; DIELECTRIC MATERIALS; ELECTRIC RESISTANCE; ERROR ANALYSIS; MATERIALS TESTING; MATHEMATICAL MODELS; MICROSTRIP LINES; MICROWAVE MEASUREMENT; PHASE MEASUREMENT; SCATTERING PARAMETERS; TRANSMISSION LINE THEORY;

FINITE SERIES RESISTANCE; INTEGRATED CIRCUIT INTERCONNECTION; SUBMICRON TRANSMISSION LINE;

INTEGRATED CIRCUIT TESTING;

EID: 0034239048     PISSN: 15213323     EISSN: None     Source Type: Journal    
DOI: 10.1109/6040.861552     Document Type: Article

References (12)

1. S. Ramo, J. Whinnery, and T. V. Duzer, Fields and Waves in Communication Electronics. New York: Wiley, 1965.
2. R. J. Friar and D. P. Neikirk, "Eimitations due to systematic phase errors on the extraction of loss tangent from micron-sized transmission line test structures," in Proc. IEEE 8th Topical Meeting Electrical Performance Electron. Packag., San Diego, CA, Oct. 25-27, 1999.
3. W. Eisenstadt and Y. Eo, "S-parameter-based IC interconnect transmission line characterization," IEEE Trans. Comp., Hybrids, Manufact. Technol., vol. 15, pp. 483-490, 1992.
4. D. Williams and R. Marks, "Accurate transmission line characterization," IEEE Microwave Guided Wave Lett., vol. 3, pp. 247-249, 1993.
5. M. Steer, S. Goldberg, G. Rinne, P. Franzon, I. Turlik, and J. Kasten, "Introducing the through-line deembedding procedure," in Proc. IEEE MTT-S Int. Microwave Symp. Dig., 1992, pp. 1455-1458.
6. H. Wheeler, "Transmission-line properties of a strip on a dielectric sheet on a plane," IEEE Trans. Microwave Theory Tech., vol. MTT-25, pp. 631-647, 1977.
7. K. C. Gupta, R. Garg, and I. J. Bahl, Microstrip Lines and Slot-lines. Norwood, MA: Artech House, 1979.
8. B. Wadell, Transmission Line Design Handbook. Norwood, MA: Artech House, 1991.
9. A. E. Ruehli, "Inductance calculations in a complex integrated circuit environment," IBM J. Res. Develop., pp. 470-481, 1972.
10. E. Tuncer, B.-T. Lee, and D. P. Neikirk, "Interconnect series impedance determination using a surface ribbon method," in Proc. IEEE 3rd Topical Meeting Electrical Performance Electron. Packag., Monterey, CA, Nov. 2-4, 1994.
11. Hewlett-Packard, HP Test & Measurement 1999 Catalog: Hewlett-Packard Corporation, 1999.
12. R. J. Friar and D. P. Neikirk, "Experimental determination of the importance of inductance in sub-micron microstrip lines," in Proc. 1999 Int. Interconnect Technol. Conf., San Francisco, CA, May 24-26, 1999.