Tailoring polymer properties with ion beams

Semiconductor International

Volumn 23, Issue 8, 2000, Pages 251-252,-254,-256,-258

  Capps, Nathan ^a   Carter, Dan ^a   Roche, Greg ^a  

^a Advanced Energy Industries Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CURRENT DENSITY; ELECTRIC INSULATING MATERIALS; INTERCONNECTION NETWORKS; ION BEAM LITHOGRAPHY; ION SOURCES; METALLIZING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRINTED CIRCUIT BOARDS; SEMICONDUCTING FILMS; SURFACE ROUGHNESS; SURFACE TREATMENT;

COPPER FILM; INTERFACIAL MIXING; MULTILEVEL METALLIZATION;

SEMICONDUCTING POLYMERS;

EID: 0034230099     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)