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Volumn 23, Issue 8, 2000, Pages 313-314,-316
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Diagnosing latch-up with backside emission microscopy
a
a
Motorola GmbH
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
EMISSION SPECTROSCOPY;
FAILURE ANALYSIS;
IMAGING TECHNIQUES;
LIGHT EMISSION;
METALLIZING;
MICROSCOPIC EXAMINATION;
PHOTOCURRENTS;
PRODUCT DESIGN;
SEMICONDUCTOR DEVICE TESTING;
BACKSIDE EMISSION MICROSCOPY;
LATCH-UP;
RAPID SEQUENCE EMISSION IMAGING;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0034229183
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (5)
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References (0)
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