Control of the arrangement of self-organized Ge dots on patterned Si(001) substrates

Thin Solid Films

Volumn 369, Issue 1, 2000, Pages 49-54

  Jin, G ^a   Liu, J L ^a   Luo, Y H ^a   Wang, K L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MOLECULAR BEAM EPITAXY; NUCLEATION; SEMICONDUCTING FILMS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SILANES;

SELECTIVE EPITAXIAL GROWTH (SEG);

SEMICONDUCTOR QUANTUM DOTS;

EID: 0034228807     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00833-6     Document Type: Article

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