Real-time thickness and compositional control of Ga1-xInxP growth using p-polarized reflectance

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 I, 2000, Pages 1190-1195

  Woods, V ^a   Dietz, N ^a   Ito, K ^a   Lauko, I ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHEMICAL BEAM EPITAXY; CLOSED LOOP CONTROL SYSTEMS; ELECTROOPTICAL MATERIALS; HETEROJUNCTIONS; KINETIC THEORY; MATHEMATICAL MODELS; SEMICONDUCTOR GROWTH;

GALLIUM INDIUM PHOSPHIDE; POLARIZED REFLECTANCE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0034227816     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582469     Document Type: Article

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