Measurement of axial pressure distribution on a rotor of a helical grooved molecular drag pump

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1772-1776

  Sawada, T ^a   Sugiyama, W ^a   Takano, K ^b  

^a AKITA UNIVERSITY   (Japan)

^b MITSUI ENGINEERING AND SHIPBUILDING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

PRESSURE DISTRIBUTION; PRESSURE MEASUREMENT; ROTORS;

HELICAL GROOVED MOLECULAR DRAG PUMPS;

VACUUM PUMPS;

EID: 0034227425     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582422     Document Type: Article

References (7)

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4. K. Nanbu, H Kubota, S. Igarashi, C. Urano, and H. Enosawa, Trans. Jpn. Soc. Mech. Eng., Ser. B 57, 172 (1991) (in Japanese).
5. th International Conference on Fluid Sealing, Innsbruck, 1984, p. 409 (unpublished).
6. T. Sawada, Sci. Pap. Inst. Phys. Chem. Res. (Jpn.) 70, 79 (1976).
7. T. Sawada, M. Nakamura, and A. Abumiya, Vacuum 43, 1097 (1992).