Observation of an enhanced N 1s shake-up satellite on nitrided Si(100) and correlation with N bonding geometry

Applied Surface Science

Volumn 161, Issue 3, 2000, Pages 328-332

  Bater, C ^a   Sanders, M ^a   Craig Jr , J H ^a   Pannell, K H ^a   Wang, P W ^a  

^a UNIVERSITY OF TEXAS AT EL PASO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; BINDING ENERGY; CORRELATION METHODS; CRYSTAL ORIENTATION; ELECTRON ENERGY LOSS SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; NITRIDING; NITROGEN OXIDES; SILICON NITRIDE; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

SHAKE-UP SATELLITE;

SILICON;

EID: 0034224189     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00112-4     Document Type: Article

References (14)

1. Habraken F.H.P.M., Kuiper A.E.T. Mater. Sci. Eng., R. 12:1994;123-175.
2. C. Bater, M Sanders, J.H. Craig, Jr., Surf. Interface Anal., in press.
3. Edamoto K., Tanaka S., Onchi M., Nishijima M. Surf. Sci. 167:1986;285.
4. Clark D.T., Dilks A. J. Polym. Sci., Polym. Chem. Ed. 15:1977;2321.
5. Agren H., Roos B.O., Bagus P.S. J. Chem. Phys. 77:1982;3893.
6. Dresser M.J., Taylor P.A., Wallace R.M., Choyke W.J., Yates J.T. Jr. Surf. Sci. 218:1989;75.
7. Tillborg H., Nilsson A., Martensson N. J. Electron Spectrosc. Relat. Phenom. 62:1993;73.
8. Nilsson A., Tillborg H., Martensson N. Phys. Rev. Lett. 67:1991;1015.
9. D. Briggs, M.P. Seah, Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, Wiley, p. 130.
10. Hedberg K. J. Am. Chem. Soc. 77:1955;6491.
11. Taguchi Y., Fujisawa M., Kuwahara Y., Onchi M., Nishijima M. Surf. Sci. 217:1989;L 413.
12. Folkesson B. Acta Chem. Scand. 27:1973;287.
13. Richman EdwardsM.H. Inorg. Chim. Acta. 20:1976;167.
14. Lucovsky G., Yang J., Chao S.S., Tyler J.E., Czbatyj W. Phys. Rev., B. 28:1983;3234.