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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 7 B, 2000, Pages 4528-4531

Molybdenum carbide prepared by chemical vapor deposition

(3) Nagai, Masatoshi a Shishikura, Isao a,b Omi, Shinzo a

a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY (Japan)

b SEIKO EPSON CORPORATION (Japan)

Author keywords

Benzene; CVD; Hot wall reactor; Mocl5; X ray photoelectron spectroscopy; XRD; Mo2C

Indexed keywords

ARGON; BENZENE; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; HYDROGEN; PRESSURE EFFECTS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

HOT-WALL REACTORS; MOLYBDENUM CARBIDES;

MOLYBDENUM COMPOUNDS;

EID: 0034224165 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.4528 Document Type: Article

Times cited : (8)

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