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Volumn 39, Issue 7 A, 2000, Pages 3867-3871
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The instability mechanisms of hydrogenated amorphous silicon thin film transistors under AC bias stress
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Author keywords
A Si:H TFT; AC; Charge compensation; Charge trapping; Duty ratio; RC effect; State creation
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Indexed keywords
AMORPHOUS SILICON;
DEGRADATION;
ELECTRODES;
HYDROGENATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON NITRIDE;
STABILITY;
STRESS ANALYSIS;
THRESHOLD VOLTAGE;
AC BIAS STRESS;
CHARGE COMPENSATION;
CHARGE TRAPPING;
HYDROGENATED AMORPHOUS SILICON THIN FILM TRANSISTORS;
STATE CREATION;
THIN FILM TRANSISTORS;
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EID: 0034215744
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.39.3867 Document Type: Article |
Times cited : (39)
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References (11)
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