Breakdown and recovery of thin gate oxides

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 6 B, 2000, Pages

  Bearda, Twan ^a   Mertens, Paul W ^a   Heyns, Marc M ^a   Wallinga, Hans ^a   Woerlee, Pierre ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC CURRENTS; ELECTRIC IMPEDANCE; ELECTRIC POTENTIAL; OXIDES; SEMICONDUCTOR DEVICE TESTING; STRESSES; THIN FILMS;

GATE OXIDES;

GATES (TRANSISTOR);

EID: 0034206794     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l582     Document Type: Article

References (9)