Global space charge effect in SCALPEL

Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 299-302

  Mkrtchyan, M ^a,b   Munro, E ^a   Liddle, J A ^a   Stanton, S T ^a   Waskiewicz, W K ^a   Farrow, R C ^a   Katsap, V ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; ELECTRIC SPACE CHARGE; FOCUSING; MONTE CARLO METHODS; OPTICAL INSTRUMENT LENSES; PROJECTION SYSTEMS;

COULOMB INTERACTION; GLOBAL SPACE CHARGE EFFECT; MAGNIFICATION; PROJECTION OPTICS;

ELECTRON BEAM LITHOGRAPHY;

EID: 0034205515     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00319-1     Document Type: Article

References (6)

1. 1. G. H. Jansen, Coulomb Interactions in Particle Beams (Academic, Boston, 1990)
2. rd Ed., Cambridge University Press (1971).
3. 3. E. Munroe, to appear in the Proceedings of SPIE'99 Conference on Charge Particle Optics.
4. 4. G. I. Winograd, W. D. Meisburger, R. F. Pease, to appear in J. Vac. Sci. Techn. (1999).
5. 5. L. Han, W. D. Meisburger, R. F. Pease, G. I. Winograd, to appear in the Proceedings of SPIE'99 Conference on Charge Particle Optics.
6. 6. M. M. Mkrtchyan, J.A. Liddle, S. D. Berger, L. R. Harriott, J. M. Gibson, A. M Schwartz, J. Appl. Phys., 78, 6888 (1995).