Preparation of crystal oriented α-SiC films by pulsed ArF laser deposition on Si(111)

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 21, Issue 6, 2000, Pages 570-575

  Wang, Yuxia ^a   Wen, Jun ^a   Guo, Zhen ^a   Tang, Honggao ^a   Huang, Jipo ^a   Wang, Lianwei ^a   Lin, Chenglu ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; DEPOSITION; LASER APPLICATIONS; PHOTOLUMINESCENCE; SILICON CARBIDE;

AMORPHOUS NUCLEATION; LASER DEPOSITION;

THIN FILMS;

EID: 0034197646     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)