Delivery of pure ozone in ultrahigh vacuum

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 3, 2000, Pages 992-994

  Zhukov, V ^a   Popova, I ^a   Yates Jr , J T ^a  

^a UNIVERSITY OF PITTSBURGH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; MOLECULAR BEAMS; PRESSURE EFFECTS; VACUUM APPLICATIONS;

GLASS VACUUM SYSTEMS;

OZONE;

EID: 0034187395     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582288     Document Type: Article

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