Profile control of continuous relief micro optical element in photoresist

Guangxue Xuebao/Acta Optica Sinica

Volumn 20, Issue 5, 2000, Pages 691-696

  Zeng, Hongjun ^a   Du, Chunlei ^a   Wang, Yongru ^a   Bai, Linbo ^a   Deng, Qiling ^a   Chen, Bo ^a   Guo, Lurong ^a   Yuan, Jinghe ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MODIFICATION; PHOTORESISTS; SURFACE PROPERTIES;

MICRO OPTICAL ELEMENT; PROFILE CONTROL; RECIPROCAL EQUATION;

OPTICAL DEVICES;

EID: 0034186304     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)