Ellipsometry

Optics and Photonics News

Volumn 11, Issue 4, 2000, Pages 52-56

  Mansuripur, Masud ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER PROGRAM LISTINGS; LIGHT POLARIZATION; LIGHT REFLECTION; LIGHT TRANSMISSION; THIN FILMS;

PHASE DIFFERENCE;

ELLIPSOMETRY;

EID: 0034175382     PISSN: 10476938     EISSN: None     Source Type: Trade Journal    
DOI: 10.1364/OPN.11.4.000052     Document Type: Article

References (7)

1. A. Rothen, "The ellipsometer, an apparatus to measure thicknesses of thin surface films," Review of Scientific Instruments, 16, 26-30 (1945).
2. A.B. Winterbottom, "Optical methods of studying films on reflecting bases depending on polarization and interference phenomena," Transactions of the Faraday Society, 42, 487-95 (1946).
3. R.H. Muller, "Definitions and conventions in ellipsometry," Surface Science, 16, 14-33 (1969).
4. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light, North-Holland Publishing Co., Amsterdam, 1977.
5. R.M.A. Azzam, "Ellipsometry," Chapter 27 in Handbook of Optics, Volume 2, McGraw-Hill, New York, 1995.
6. O.S. Heavens, Optical Properties of Thin Solid Films, Butterworths, London, 1955.
7. The computer simulations reported in this article were performed by MULTILAYER™ and DIFFRACT™; both programs are products of MM Research, Inc., Tucson, AZ.