Enhanced oxidation of ion-damaged 6H-SiC

Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

Volumn 80, Issue 4, 2000, Pages 661-667

  Makhtari, A ^a   Raineri, V ^b   Calcagno, L ^c   La Via, F ^a   Frisina, F ^d   Foti, G ^c  

^a MOULAY ISMAIL UNIVERSITY   (Morocco)

^b Istituto Metodologie e Tecnologie per la Microelettronica   (Italy)

^c INFM   (Italy)

^d STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034175290     PISSN: 13642812     EISSN: None     Source Type: Journal    
DOI: 10.1080/014186300255302     Document Type: Conference Paper

References (19)