Atomic force microscope tip sharpening and evaluation by electric field confinement using a metal grid close to the tip

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 648-652

  Arai, Toyoko ^a   Tomitori, Masahiko ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; ELECTRON EMISSION; ELECTRON MICROSCOPES; SEMICONDUCTING SILICON;

ELECTRON FIELD EMISSION; FIELD EMISSION MICROSCOPES;

ATOMIC FORCE MICROSCOPY;

EID: 0034156169     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591255     Document Type: Article

References (14)

1. H.-W. Fink, IBM J. Res. Dev. 30, 460 (1986).
2. Y. Kuk and P. J. Silverman, Appl. Phys. Lett. 48, 1597 (1986).
3. F. J. Giessibl, Science 267, 68 (1995).
4. S. Kitamura and M. Iwatsuki, Jpn. J. Appl. Phys., Part 2 34, L145 (1995).
5. H. Ueyama, M. Ohta, Y. Sugawara, and S. Morita, Jpn. J. Appl. Phys., Part 2 34, L1086 (1995).
6. N. Nakagiri, M. Suzuki, K. Okiguchi, and H. Sugimura, Surf. Sci. 272, L329 (1997).
7. T. Arai and M. Tomitori, Jpn. J. Appl. Phys., Part 1 36, 3855 (1997).
8. T. Arai and M. Tomitori, Appl. Phys. A: Mater. Sci. Process. 66, S319 (1998).
9. M. Tomitori and T. Arai, Appl. Surf. Sci. 140, 432 (1999).
10. R. Gomer, Field Emission and Filed Ionization (Harvard University Press, Cambridge, 1961).
11. M. Tomitori, K. Sugata, G. Okuyama, and H. Kimata, Surf. Sci. 355, 21 (1996).
12. F. G. Allen, J. Phys. Chem. Solids 19, 87 (1961).
13. W. A. Schmidt and M. Naschitzki, Surf. Sci. 206, 244 (1988).
14. T. Arai and M. Tomitori, Appl. Surf. Sci. (to be published).