Room temperature YBaCuO microbolometers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 2, 2000, Pages 635-638

  Phong, L Ngo ^a   Qiu, S N ^a  

^a DEFENCE RESEARCH AND DEVELOPMENT CANADA VALCARTIER   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ETCHING; MAGNETRON SPUTTERING; MICROMACHINING; SEMICONDUCTING FILMS; SILICON WAFERS; SUBSTRATES; TEMPERATURE; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILM DEVICES; YTTRIUM BARIUM COPPER OXIDES;

MAGNETRON RADIO FREQUENCY SPUTTERING; OPTICAL RESPONSIVITY; ROOM TEMPERATURE BOLOMETER; YTTRIUM BARIUM COOPER OXIDE MICROBOLOMETER; YTTRIUM BARIUM COPPER OXIDE FILM;

BOLOMETERS;

EID: 0034155942     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582254     Document Type: Article

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