Fabrication of dielectric hollow submicrometric pipes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 713-716

  Soares, Leandro L ^a   Cescato, Lucila ^a   Cruz, Nilson C ^a   De Moraes, Mario B ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; ELECTRON BEAM LITHOGRAPHY; MASKS; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SOLVENTS; THIN FILMS; TITANIUM OXIDES;

SUBMICROMETRIC HOLLOW PIPES;

SEMICONDUCTING FILMS;

EID: 0034155907     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591264     Document Type: Article

References (9)

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