Bonding and morphology study of carbon nitride films obtained by dual ion beam sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 2, 2000, Pages 515-523

  Quiros C ^a   Prieto, P ^a   Fernandez A ^b   Elizalde, E ^a   Morant, C ^a   Schlogl R ^c   Spillecke, O ^c   Sanz, J M ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

^c FRITZ HABER INSTITUT DER MAX PLANCK GESELLSCHAFT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; COMPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; MORPHOLOGY; SPUTTER DEPOSITION; SURFACE TOPOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; DUAL ION BEAM SPUTTERING;

THIN FILMS;

EID: 0034155666     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582218     Document Type: Article

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