Smart flexible microrobots for scanning electron microscope (SEM) applications

Journal of Intelligent Material Systems and Structures

Volumn 11, Issue 3, 2000, Pages 191-198

  Schmoeckel, Ferdinand ^a   Fatikow, Sergej ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; INTEGRATED CIRCUITS; PERSONAL COMPUTERS; SCANNING ELECTRON MICROSCOPY; VACUUM APPLICATIONS;

FLEXIBLE ASSEMBLY FACILITY; SMART FLEXIBLE MICROROBOTS; VACUUM CHAMBER;

INTELLIGENT ROBOTS;

EID: 0034149145     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1106/CFW1-96ET-3QVN-YV86     Document Type: Article

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