|
|
|
Volumn 17, Issue 2, 2000, Pages 17-18,-20,-24
|
|
MEMS reshapes ultrasonic sensing
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
COST EFFECTIVENESS;
FLOW MEASUREMENT;
INDUSTRIAL APPLICATIONS;
MEDICAL IMAGING;
NONDESTRUCTIVE EXAMINATION;
PERFORMANCE;
RELIABILITY;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICES;
SENSORS;
TECHNOLOGY TRANSFER;
ULTRASONIC DEVICES;
AIR SENSORS;
IMMERSION APPLICATIONS;
MULTI ELEMENT SENSOR ARRAY;
ULTRASONIC SENSING;
MICROELECTROMECHANICAL DEVICES;
|
|
EID: 0034140754
PISSN: 07469462
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
|
Times cited : (4)
|
|
References (0)
|
