Breakdown voltage analysis for thin film SOI RESURF structure

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 21, Issue 2, 2000, Pages 161-168

  Li, Wenhong ^a   Luo, Jinsheng ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; MATHEMATICAL MODELS; POISSON DISTRIBUTION; THIN FILMS; TWO DIMENSIONAL;

BREAKDOWNS VOLTAGE ANALYSIS; SOI RESURF STRUCTURE;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0034139181     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)