Study of 6H-SiC MOSFET

Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics

Volumn 20, Issue 1, 2000, Pages 1-6

  Zhang, Yuming ^a   Zhang, Yimen ^a   Luo, Jinsheng ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANALYSIS; FABRICATION; MOS DEVICES; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE;

MASS SPECTRUM ANALYSIS;

FIELD EFFECT TRANSISTORS;

EID: 0034139099     PISSN: 10003819     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)