Design and fabrication of 0.15μm thin-film fully depleted MOS/SOI device

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 21, Issue 2, 2000, Pages 156-160

  Zhang, Xing ^a   Wang, Yangyuan ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DESIGN; SILICON ON INSULATOR TECHNOLOGY; THIN FILMS;

DEEP SUBMICROMETER SOI DEVICE; MOS/SOI DEVICE;

MOS DEVICES;

EID: 0034138486     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)