SiNx-submicrometer coatings: Optimization of film properties

Advanced Engineering Materials

Volumn 2, Issue 1-2, 2000, Pages 53-56

  Tikana, Ladji ^a   Pohl, Michael ^a   Zösch, Antje ^b   Zahn, Wieland ^b   Wuttke, Werner ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIVERSITY OF APPLIED SCIENCES ZWICKAU   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034134388     PISSN: 14381656     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1527-2648(200002)2:1/2<53::aid-adem53>3.3.co;2-6     Document Type: Article

References (3)

1. J. A. Thornton, J. Vac. Sci. Technol. 1974, 11, 666.
2. A. Zösch, PhD Thesis, University of Chemnitz 1993.
3. M. Pohl, in DGM Conference Proceedings Werkstoffwoche 1996 Stuttgart, Werkstoff-Informationsgesellschaft, Frankfurt 1996, Vol. 7, p. 295.