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Volumn 57, Issue 3-6, 2000, Pages 629-634
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Application of statistical methods (SPC) for an optimized control of the irradiation process of high-power semiconductors
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Author keywords
Carrier lifetime tuning; Electron beam; Power semiconductors; Routine dosimeter; Statistical process control
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Indexed keywords
BIPOLAR SEMICONDUCTOR DEVICES;
CERAMIC COATINGS;
DOSIMETERS;
ELECTRIC POWER SUPPLIES TO APPARATUS;
POWER ELECTRONICS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DIODES;
STATISTICAL PROCESS CONTROL;
THYRISTORS;
CARRIER LIFETIME TUNING;
DYNAMIC SWITCHING;
ON STATE VOLTAGE;
ROUTINE DOSIMETER;
ELECTRON IRRADIATION;
CONFERENCE PAPER;
DOSIMETRY;
ELECTRON ACCELERATOR;
ELECTRON BEAM;
ENERGY;
IRRADIATION;
MONITORING;
PROCESS CONTROL;
QUALITY CONTROL;
SEMICONDUCTOR;
STATISTICAL ANALYSIS;
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EID: 0034061125
PISSN: 0969806X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0969-806X(99)00456-9 Document Type: Conference Paper |
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Times cited : (3)
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References (4)
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