Gas-sorption effects on plasma polymer films characterized by XPS and quartz crystal resonator

Polymer

Volumn 41, Issue 2, 2000, Pages 511-522

  Sugimoto, I ^a   Nakamura, M ^a   Kasai, N ^a   Katoh, T ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Gas sorption; Plasma polymer film; Radio frequency sputtering

Indexed keywords

AMINO ACIDS; FLUORINE CONTAINING POLYMERS; FLUOROCARBONS; MOLECULAR STRUCTURE; OXYGEN; PLASMAS; QUARTZ APPLICATIONS; SOLVENTS; SORPTION; SPUTTERING; SURFACE STRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

QUARTZ CRYSTAL RESONATOR; RADIO-FREQUENCY SPUTTERING;

PLASTIC FILMS;

AMINO ACID; BENZENE DERIVATIVE; ETHYLENE DERIVATIVE; FLUOROCARBON; OXYGEN; POLYMER; SILICON DIOXIDE;

ABSORPTION; ADSORPTION; ARTICLE; GAS; MOLECULAR PHYSICS; RADIOFREQUENCY; SURFACE PROPERTY; X RAY SPECTROMETRY;

EID: 0033990927     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0032-3861(99)00192-5     Document Type: Article

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