Phase detection of electrostatic force by AFM with a conductive tip

Ultramicroscopy

Volumn 82, Issue 1-4, 2000, Pages 63-68

  Takahashi, T ^a   Kawamukai, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Electrostatic force; Fermi level; Kelvin probe force microscopy; Surface potential; Work function

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRIC POTENTIAL; ELECTROSTATICS; FERMI LEVEL; PHASE MEASUREMENT; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; SURFACE PROPERTIES;

ELECTROSTATIC FORCE; KELVIN PROBE FORCE MICROSCOPY; PHASE DETECTION;

ATOMIC FORCE MICROSCOPY;

ACCURACY; ARTICLE; ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ELECTRICITY; POTENTIOMETRY; VALIDATION PROCESS;

EID: 0033964903     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00124-2     Document Type: Article

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