SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 128-129, Issue , 2000, Pages 329-333

Synthesis of boron carbide films by ion beam sputtering

(5) Chen, Hai Ying a Wang, Jing a Yang, Hai a Li, Wen Zhi a Li, Heng De a

a TSINGHUA UNIVERSITY (China)

Author keywords

Boron carbide; Hardness; Ion beam sputtering; Thin films

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BORON CARBIDE; FILM PREPARATION; INFRARED SPECTROSCOPY; ION BEAMS; MICROHARDNESS; SPUTTER DEPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ION BEAM SPUTTERING;

PROTECTIVE COATINGS;

BORON CARBIDE; DEPOSITION; HARDNESS;

EID: 0033942617 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00599-5 Document Type: Conference Paper

Times cited : (29)

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