In situ deposition of sputtered PZT films: Control of the growth temperature by the sputtered lead flux

Vacuum

Volumn 56, Issue 3, 2000, Pages 199-204

  Velu, G ^a   Remiens, D ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; FERROELECTRIC MATERIALS; FILM GROWTH; LEAD COMPOUNDS; PHASE TRANSITIONS; SILICON WAFERS; SPUTTER DEPOSITION; THIN FILMS;

LEAD ZIRCONATE TITANATE;

DIELECTRIC FILMS;

EID: 0033906861     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00204-3     Document Type: Article

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