Crystal growth under heat field rotation conditions

Solid-State Electronics

Volumn 44, Issue 5, 2000, Pages 819-824

  Kokh, Alexandr E ^a   Kononova, Nadegda G ^a  

^a SOBOLEV INSTITUTE OF GEOLOGY AND MINERALOGY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH FROM MELT;

HEAT FIELD ROTATION METHOD (HFRM);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033906119     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(99)00279-8     Document Type: Article

References (6)

1. Kobayashi N. J. of Crystal Growth. 147:1995;382-389.
2. Scheel H.J., Schulz-Dubous E.O. J. of Crystal Growth. 8:1971;304-306.
3. Kokh A. J. of Crystal Growth. 191:1998;774-778.
4. Kokh A.E., Kokh V.E., Guets V.A., Kononova N.G. Instruments and experimental Techniques. 41:(4):1998;587-591.
5. Pylneva A et al. Proceedings SPIE, 1999. 3610 148-55.
6. Durčok S., Pollert E. J. of Crystal Growth. 82:1987;501-508.