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Volumn 211, Issue 1, 2000, Pages 365-371
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Numerical model for inductively heated cylindrical silicon tube growth system
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Author keywords
[No Author keywords available]
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Indexed keywords
BOUNDARY CONDITIONS;
COMPUTER SIMULATION;
HEAT CONDUCTION;
HEAT CONVECTION;
HEAT RADIATION;
MAGNETIC FIELDS;
MATHEMATICAL MODELS;
SILICON WAFERS;
TEMPERATURE;
CYLINDRICAL SILICON TUBE;
EDGE DEFINED FILM FED GROWTH PROCESS;
MAGNETIC VECTOR POTENTIAL EQUATION;
TUBE GROWTH;
CRYSTAL GROWTH;
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EID: 0033901678
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(99)00807-6 Document Type: Article |
Times cited : (14)
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References (10)
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