Surface film formation by chemical vapor deposition of di-p-xylylene: ellipsometrical, atomic force microscopy, and X-ray studies

Langmuir

Volumn 16, Issue 6, 2000, Pages 2887-2892

  Göschel, Ulrich ^a,c   Walter, Harald ^b,d  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

^c UNIVERSITY OF STUTTGART   (Germany)

^d November AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; FILM PREPARATION; MOLECULAR STRUCTURE; ORGANIC POLYMERS; PYROLYSIS; SILICON WAFERS; SUBLIMATION; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS; X RAY SCATTERING;

LAMELLAR STRUCTURE; POLYXYLYLENE; SMALL ANGLE X RAY SCATTERING; WIDE ANGLE X RAY DIFFRACTION;

THIN FILMS;

EID: 0033901657     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la9908743     Document Type: Article

References (34)

1. Encyclopedia Polymer Science and Engineering, John Wiley & Sons Inc.: New York, 1989; Vol. 17, p 990.
2. Gorham, W. F. J. Polym. Sci. 1966, A1-4, 3027.
3. Isoda, S. Polymer 1984, 25, 615.
4. Zhang, W.; Thomas, E. L. J. Polym. Sci., Polym. Phys. 1992, 30, 1285.
5. Wunderlich, B. Macromolecular Physics; Academic Press: New York, 1978; Vol. 2.
6. Surendran, G.; Gazicki, M.; James, W. J. Polym. Sci., Polym. Chem. 1987, 25, 1481.
7. Kubo, S.; Wunderlich, B. J. Polym. Sci., Polym. Phys. 1972, 10, 1949.
8. Gazicki, M.; Surendan, G.; James, W.; Yasuda, H. J. Polym. Sci., Polym. Chem. 1986, 24, 215.
9. Schäfer, O.; Greiner, A. Macromolecules 1996, 29, 6074.
10. Iwatsuki, S.; Kubo, M.; Kumeuchi, T. Chem. Lett. 1991, 1071.
11. Tatsuo, K.; Ishikawa, K.; Koda, T.; Tokura, Y.; Takeda, K. Appl. Phyt. Lett. 1987, 51, 1957.
12. Kubono, A.; Kitoh, T.; Kajikawa, K.; Umemoto, S.; Takezoe, H.; Fukuda, A.; Okui, N. Jpn. J. Appl. Phys. 1992, 31, 1195.
13. Shirai, M.; Kinoshita, H.; Sumino, T.; Miwa, T.; Tsunooka, M. Chem. Mater. 1993, 5, 98.
14. Sekiguchi, A.; Pasztor, K.; Masuhara, H. J. Vac. Sci. Technol. 1992, A10, 1508.
15. Salem, J. R.; Sequeda, F. O.; Duran, J.; Lee, W. Y.; Yang, R. M. J. Vac. Sci Techn., 1986, A4, 369.
16. Itoh, T.; Iwasaki, T.; Kubo, M.; Iwatauki, S. Polym. Bull. 1995, 35, 307.
17. Niegisch, W. D. J. Appl. Phys. 1966, 37, 4041.
18. Iwamoto, R.; Wunderlich, B. J. Polym. Sci., Polym. Phys. 1973, 11, 2403.
19. Isoda, S.; Tsuji, M.; Ohara, M.; Kawaguchi, A.; Katayama, K. Polymer 1983, 24, 1155.
20. Iwamoto, R.; Bopp, R. C.; Wunderlich, B. J. Polym. Sci., Polym. Phys. 1975, 13, 1926.
21. Kramer, P.; Sharma, A. K.; Hennecke, E. E.; Yaauda, H.J. Polym. Sci., Polym. Chem. Ed. 1984, 22, 475.
22. Gazicki, M.; Surendran, G.; James, W. J.; Yasuda, H. J. Polym. Sci., Polym. Chem. Ed. 1986, 23, 2255.
23. Mailyan, K. A.; Chvalun, S. N.; Pebalk, A. V.; Kardash, I. E. J. Polym. Sci. 1992, 34, 761.
24. Greiner, A.; Mang, S.; Schäfer, O.; Simon, P. Acta Polym. 1997, 48, 1.
25. Göschel, U.; Bastiaansen, C.; Lemstra, P. J. EPS Conf. Abstract 1997, 21B, 153.
26. van Mol, A. M. B.; Driessen, J. P. A. M.; Spee, C. I. M. A. J. Chem. Vap. Deposition, submitted.
27. Motschmann, H.; Stamm, M.; Toprakcioglu, C. Macromolecules 1991, 24, 3681.
28. Azzam, R. M. A.; Bashara, N. M. Ellipsometry and Polarized Light; North Holland Publications: Amsterdam, 1987.
29. Edward, D. P., Ed. Handbook of Optical Constants of Solids; Academic Press: London, 1985.
30. Lautenschlager, P.; Garriga, M.; Vina, L.; Cardona, M. Phys. Rev. B 1987, 36, 4821.
31. Zhong, Q.; Innis, D.; Kjoller, K.; Ellings, V. B. Surf. Sci. Lett. 1993, 290, 688.
32. Göschel, U.; Höhne, G. W. H. J. Therm. Anal. Calorim., in press.
33. Groh, W.; Zimmermann, A. Macromolecules 1991, 24, 6660.
34. Isoda, S.; Kawaguchi, A.; Katayama, K. I. J. Polym. Sci., Polym. Phys. Ed. 1984, 22, 669.