Design and analysis of MEMS-based slider suspensions for a high-performance magnetic recording system

Journal of Micromechanics and Microengineering

Volumn 10, Issue 1, 2000, Pages 64-71

  Sheng, Gang ^a   Liu, Bo ^a   Hua, Wei ^a   Miao, Yubo ^b   Xu, Bai ^b   Yan, Loke ^b   Sridhar, Uppilli ^b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLENESS; COMPUTER SIMULATION; FRACTURE MECHANICS; MAGNETIC RECORDING; MATHEMATICAL MODELS;

MICRO-DEFLECTORS; MICRO-SUSPENSIONS; SLIDER-SUSPENSION DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033899331     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/1/309     Document Type: Article

References (12)

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